CMP Equipment
AMAT / EBARA CMP Equipment
▶ 8 inch (200mm)
▶ Dry In & Dry Out
▶ Excellent Process Performance
▶ High stability / Convenient maintenance
▶ Chemical cleaning is possible
▶ Polish End Point Detect (Option)
Item | Specifications | |
---|---|---|
Configuration | Number of TopRings | 2 |
Number of TurnTables | 2 | |
Number of Cleaning Units | 4 | |
Outline Dimensions (W*D*H [mm]) | 2000*3490*2450 |
▶ 12 inch (300mm)
▶ Dry In & Dry Out
▶ High Throughput
▶ Excellent Process Performance
▶ High stability / Convenient maintenance
▶ Chemical cleaning is possible
▶ Polish End Point Detect (Option)
Item | Specifications | |
---|---|---|
Configuration | Number of TopRings | 4 |
Number of TurnTables | 4 | |
Number of Cleaning Units | 4 | |
Outline Dimensions (W*D*H [mm]) | 2300*4950*2850 |
CMP Equipment Refurbishment / Set-Up / Relocation / Disassemble / Trouble Shooting etc…