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우진

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Part's Repair

CMP Equipment

AMAT / EBARA CMP Equipment

◎ MKS Ozone Generator Repair
  • ◎ MKS Ozone Generator Repair
    Maker Model
    MKS AX8200A Cer
    AX8200A
    AX8406
    AX8406B
    AX8403A
    AX8407A
◎ Wafer Alignment Laser Head Repair
  • 1. ASML Wafer Alignment System ( ATHENA ) : Combination of Red Laser and Green Laser

    -. Red Laser : He-Ne Gas Laser
    -. Green Laser : Diode Laser Pumping Solid State Laser (DPSSL)

  • 2. HP Two - Frequency Stabilized Gas Laser
    Repair   Model 5517A
    5517B
    5517C
    5517D
  • 3. Zygo Laser Head
    Repair   Model 7701
    7702
    7712
    7714
◎ HORIBA Product item Repair
  • Horiba Injection Valve / LFM / LFC
    Model Repair item
    IV-2410 Series
    ( IV-2410AV , IV2411AV , … Etc .. )     		Must Repair item : Plunger , Metal Seal , Temp Switch
    Replace in case of failure : Heater , T.C , Air Valve Piezo , Connector , Air Tip
    LF (Liquid Meter) Series
    ( LF-310A-EVD , LF-A40M , … Etc .. )    		 Must Repair item : Cycle Chemical Clean , PCB Repair
    Replace in case of failure : Sol Valve , Air Tip
    LV (Liquid Controller) Series
    ( LV-310 , LV-410 , … Etc .. )     		Must Repair item : PCB Repair , Plunger , Seal Change
    Replace in case of failure : Piezo Valve , Sol Valve , Air Tip
    VC-SEF Series
    ( VC-1310 , SEF-8240 , … Etc .. )     		Must Repair item : Plunger , Metal Seal , Temp Switch
    Replace in case of failure : Sensor , PCB , Heater , T.C , Piezo , Connector
◎ TEL VIGUS LK3 Focus Ring Heater 2nd New Product Part`s

  • Ceramic Ring(EDX Analysis) : Material is Alumina(Al2O3)
    Adhesive (EDX Analysis) : Silicone Adhesive